Vacuum chamber
真空室 |
φ1000 X H1000mm2 |
Effective Coating Space
有效镀膜空间 |
φ800 X H750mm2 |
Ultimate Pressure
极限真空度 |
＜4.0X10-3Pa |
Leak rate
漏气率 |
0.5Pa/Hr |
Pump down time
(From atmosphere to 6.6X10-3Pa empty chamber at room temperature )
抽气时间（空真空条件下由大气抽至6.6X10-3Pa） |
＜20 mins |
Coating cycle (Tool coating)
镀膜时间(工具镀膜) |
120-240mins |
Cooling Water Circulation
冷却水循环 |
5 t/Hr approx，2.5kg/cm2，
20±5℃ |
Total Electric Power
总电功率 |
90 KW |
Occupation Space
占据空间 |
6X5X3.5m3 |
Application
应用 |
Tool coating |
| | |
1-Main body
主体 |
1 Set |
1).The process chamber with1000mm inner diameter and 1000mm inner height and is made of 304 stainless steel.
真空腔体内部直径:1000mm，内部高度:1000mm。整个腔体均使用304不锈钢材料制造。 |
1 Set |
2).The total vacuum chamber is water cooled. The water will cool the chamber both during processing and during heating when loading substrate.
整个真空腔体都是采用水冷方式进行冷却。在镀膜进行过程中和在装载工件时的加热过程中，冷却水都将对腔体进行冷却。 |
1 Set |
3).The chamber frame has 1 (one) connecting flanges, for the connection of the oil diffusion vacuum pumps with the pumping speed over 8000L/s.
在真空腔体外侧开有1个连接法兰，用来与抽速大于8000L/s的油扩散型真空泵相连接。 |
1 set |
4).Wider field viewing ports，sight glass with cooling water system
大视野观察窗设计，视镜带水冷系统 |
2 sets |
| 5).Circumjacent Rodlike Heater（18PCS）Total power:36Kw, Highest Temperature: 450 ℃ (Centigrade) 周边棒型加热器，共18支加热棒，总功率36kw， 最高温度450摄氏度。 |
1 set | |
2-Substrate Turntable System
工件转架系统 |
1 set |
1).Using underdrive structure,digital control,frequency control of motor speed.
转架采用下传动结构；数字调节渐起渐停，变频调速。 |
1 set |
2).Double stage planetary rotation of the substrates during the coating process is possible for small substrates as well as a double or single rotation for substrates with large dimensions.
双级行星式旋转的转架系统，既适合于对小体积工件进行加工，同时也适合对大尺寸的工件进行镀膜加工。 |
1 set |
a). Workpiece Cage for small substrates
工件笼，用于镀小件 |
1 set |
b). Workpiece tray for big substrates
工件托盘 ，用于镀大件 |
1 set |
c).Workpiece pushcart for transferring
工件车，用于转运移动 |
1 set | |
3- Vacuum Pumping System
真空获得系统 |
1 set |
1).Leybold Trivac D8C rotary vane vacuum Pump for rough pumping
用于前级的莱宝直联式双级旋片真空泵D8C |
1 set |
2).Leybold single stage rotary vane vacuum pump SV300B
莱宝单级旋片真空泵SV300B |
1 set |
3).CUIMAN Roots Pump RTO -150S with 150L/s pumping speed
RTO-150S上海萃曼罗茨泵 |
1 Set |
4).Varian(Agilent)VHS-400 Oil Diffusion Pump or Leybold DIP 8000 Oil Diffusion pump
瓦里安（安捷伦）VHS-400 扩散泵 或 莱宝DIP8000 扩散泵 |
1 Set |
5).Pneumatic driven Valve
气动挡板阀门 |
3 sets |
6).Pumping port Grille
抽气口隔栅 |
1 Set |
7).Electric throttle Valve
电动节流阀 |
1 Set |
8).The discal evaporations are particularly suitable for industrialized batch production. Water cooling directly.
特别适于工业化批量镀膜的圆盘电弧靶, 直接水冷。 |
8 Sets |
9).DC Arc Power Supplies
直流弧电源 |
8 Sets | |
4- European Bias Power supply
欧洲进口直流电源 |
1 set |
36KW; Ion bombardment for cleaning and heating;
More Stable and Reliable, high precision control.
36KW功率;具有离子轰击清洗和轰击加热功能；
稳定可靠,高精度控制。
|
1 set | |
5-Gas mass flow control system
气体质量流量控制系统 |
1 set |
1).High-precision and fast reaction mass flow controller
高精度快速反应型质量流量控制器 |
4 Sets |
2).Connecting flange diameter per gas:swage lock
各种气体连接法兰:快卸接头 |
4 Sets | |
6-System control cabinet
系统控制柜 |
1 Set |
Mitsubishi PLC
日本三菱PLC |
1 Set |
ADVANTECH Industrial Control Computer
研华工业控制计算机
|
1 Set | |
