| 19, June 2012 |
Vacuum chamber
真空室 |
φ500 X H600mm2 |
Effective Coating Space
有效镀膜空间 |
φ400 X H420mm2 |
Ultimate Pressure
极限真空度 |
＜1.3X10-3Pa |
Leak rate
漏气率 |
0.5Pa/Hr |
Pump down time
(From atmosphere to 6.6X10-3Pa empty chamber at room temperature )
抽气时间（空真空条件下由大气抽至6.6X10-3Pa） |
＜30 mins |
Coating cycle (Tool coating)
镀膜时间(工具镀膜) |
120-180mins |
Cooling Water Circulation
冷却水循环 |
2 t/Hr approx，1-1.5kg/cm2，
20±5℃ |
Total Electric Power
总电功率 |
30 KW |
Occupation Space
占据空间 |
4X2X2.2m3 |
Application
应用 |
Tools coating |
| | |
1-Main body
主体 |
1 Set |
1).The process chamber with500mm inner diameter and 600mm inner height and is
made of 304 stainless steel. Solid and durable stainless steel structure, side
access door design contribute to easy turntable loading.
真空腔体内部直径:500mm，内部高度:600mm。整个腔体均使用304不锈钢材料制造。不锈钢结构，
坚固耐用，侧面开门设计，便于工件转架的整体装卸； |
1 Set |
2).The total vacuum chamber is water cooled. The water will cool the chamber both during processing and during heating when loading substrate.
整个真空腔体都是采用水冷方式进行冷却。在镀膜进行过程中和在装载工件时的加热过程中，
冷却水都将对腔体进行冷却。 |
1 Set |
3).The chamber frame has 1 (one) connecting flanges, for the connection of the turbomolecular pump with the pumping speed over 1500L/s .
在真空腔体外侧开有1个连接法兰，用来与抽速大于1500L/s的涡轮分子泵相连接。 |
1 set |
4).Wider field viewing port，sight glass with cooling water system
大视野观察窗设计，视镜带水冷系统 |
1 set |
5).Circumjacent Rodlike Heater,Highest Temperature: 450 ℃ (Centigrade)
周边棒型加热器，最高温度450摄氏度。 |
1 set | |
2-Substrate Turntable System
工件转架系统 |
1 set |
1).Using underdrive structure,digital control,frequency control of motor speed.
转架采用下传动结构；数字调节渐起渐停，变频调速。 |
1 set |
2).Double stage planetary rotation of the substrates during the coating process is possible for small substrates as well as a double or single rotation for substrates with large dimensions.
双级行星式旋转的转架系统，既适合于对小体积工件进行加工，同时也适合对较大尺寸的工件进行镀膜加工。 |
1 set |
a). Workpiece Holder for small substrates
工件笼，用于镀小件 |
1 set |
b).Workpiece pushcart for transferring
工件车，用于转运移动 |
1 set | |
3- Vacuum Pumping System
真空获得系统 |
1 set |
1).ULVAC VDN-601 rotary vane vacuum Pump for rough pumping(TMN-401 Oil Mist Filter)
用于前级的爱发科直联式双级旋片真空泵VDN-601(配TMN-401 油雾过滤器) |
1 set |
2).KYKY-250 turbomolecular pump with the pumping speed over 1500L/s
科仪涡轮分子泵 抽气速度:1500L/s |
1 set |
3).Pneumatic High Vacuum Flapper Valve
气动挡板阀门 |
3 Sets |
4).Pumping port Grille
抽气口隔栅 |
1 set |
5).Electric throttle
电动节流阀 |
1 set |
6).The discal evaporations are particularly suitable for industrialized batch production. Water cooling directly.
特别适于工业化批量镀膜的圆盘电弧靶(直冷式) |
4 Sets |
7).DC Arc Power Supplies
直流弧电源 |
4 Sets | |
4- European Bias Power supply
欧洲进口直流电源 |
1 set |
Leading-edge arc management and extremely low stored energy
Flexible arc management
Adaptable to many processes and applications
Deposit ultra-thin, homogeneous films
Optimize process parameters for high productivity and high yields
Reduced need for maintenance
High Reliability,High uptime and long product life
先进的电弧管理技术，极低的电弧剩余能量
灵活的电弧管理系统支持多种工艺和应用
沉积超薄、均匀的膜层
优化电源参数，从而实现高产量和高性能;维护成本低
可靠性高，使用寿命长 |
1 set | |
5-Gas mass flow control system
气体质量流量控制系统 |
1 set |
1).High-precision and fast reaction mass flow controller
高精度快速反应型质量流量控制器 |
4 Sets |
2).Connecting flange diameter per gas:swage lock
各种气体连接法兰:快卸接头 |
4 Sets | |
6-System control cabinet
系统控制柜 |
1 Set |
Mitsubishi PLC (Programmable Logic Control)
日本三菱PLC |
1 Set |
ADVANTECH Industrial PC system
研华工业控制计算机系统
Control system with touch-screen menu driven concept
Data logging and real-time viewing of process parameters
No programming knowledge is required for process control
Remote fault diagnostics
控制系统采用触摸屏菜单驱动设计理念
数据日志记录和工艺参数的实时地查看
工艺控制无需任何编程知识
远程故障诊断 |
1 Set | |
7-Peripherals
辅助设备 |
1 Set |
Industrial Chiller
工业冷水机 |
1 Set |
Note:Acceptance Standard
验收标准 |
Acceptance standard 1):Standard microhardness tester(designated Shanghai Taiming Model or Other third party testing institutions) , the test substrate should be carbide tool blade.The micromehardness test result of the substrate plated with 2 Microns PVD coating should be more than HV1600
验收标准1：标准显微硬度计（指定为上海泰明机型或者其它第三方测试机构），测试基片为硬质合金刀片，2微米膜厚测试结果数据为大于等于HV1600。 | |
